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Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function

Written By

Kunihiro Suzuki

Submitted: 26 May 2010 Published: 28 February 2011

DOI: 10.5772/14539

From the Edited Volume

Applications of Monte Carlo Method in Science and Engineering

Edited by Shaul Mordechai

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Written By

Kunihiro Suzuki

Submitted: 26 May 2010 Published: 28 February 2011