InTechOpen uses cookies to offer you the best online experience. By continuing to use our site, you agree to our Privacy Policy.

Nanotechnology and Nanomaterials » "Graphene - Synthesis, Characterization, Properties and Applications", book edited by Jian Ru Gong, ISBN 978-953-307-292-0, Published: September 15, 2011 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 7

Atomic Layer Deposition of High-k Oxides on Graphene

By Harry Alles, Jaan Aarik, Jekaterina Kozlova, Ahti Niilisk, Raul Rammula and Väino Sammelselg
DOI: 10.5772/20801