Open access peer-reviewed chapter

High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR)

By Sh Mohd Firdaus, Husna Omar and Ishak Abd Azid

Submitted: November 16th 2011Reviewed: May 3rd 2012Published: October 10th 2012

DOI: 10.5772/48253

Downloaded: 3813

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Sh Mohd Firdaus, Husna Omar and Ishak Abd Azid (October 10th 2012). High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR), Finite Element Analysis - New Trends and Developments, Farzad Ebrahimi, IntechOpen, DOI: 10.5772/48253. Available from:

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