Open access peer-reviewed chapter

FEA in Micro-Electro-Mechanical Systems (MEMS) Applications: A Micromachined Spatial Light Modulator (μSLM)

By Hao Ren and Jun Yao

Submitted: December 2nd 2011Reviewed: May 3rd 2012Published: October 10th 2012

DOI: 10.5772/48532

Downloaded: 1241

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Hao Ren and Jun Yao (October 10th 2012). FEA in Micro-Electro-Mechanical Systems (MEMS) Applications: A Micromachined Spatial Light Modulator (μSLM), Finite Element Analysis Farzad Ebrahimi, IntechOpen, DOI: 10.5772/48532. Available from:

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