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Materials Science » Metals and Nonmetals » "Ferroelectrics - Applications", book edited by Mickaël Lallart, ISBN 978-953-307-456-6, Published: August 23, 2011 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 2

MEMS Based on Thin Ferroelectric Layers

By Igor L. Baginsky and Edward G. Kostsov
DOI: 10.5772/17539