Open access peer-reviewed chapter

MEMS Based on Thin Ferroelectric Layers

By Igor L. Baginsky and Edward G. Kostsov

Submitted: October 21st 2010Reviewed: February 17th 2011Published: August 23rd 2011

DOI: 10.5772/17539

Downloaded: 1310

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Igor L. Baginsky and Edward G. Kostsov (August 23rd 2011). MEMS Based on Thin Ferroelectric Layers, Ferroelectrics - Applications, Mickaël Lallart, IntechOpen, DOI: 10.5772/17539. Available from:

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