Open access peer-reviewed chapter

Gas Safety for TFT-LCD Manufacturing

By Eugene Y. Ngai and Jenq-Renn Chen

Submitted: March 6th 2011Reviewed: July 13th 2011Published: November 30th 2011

DOI: 10.5772/29226

Downloaded: 3453

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Eugene Y. Ngai and Jenq-Renn Chen (November 30th 2011). Gas Safety for TFT-LCD Manufacturing, Features of Liquid Crystal Display Materials and Processes Natalia V. Kamanina, IntechOpen, DOI: 10.5772/29226. Available from:

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