Open access peer-reviewed chapter

Silicon Epitaxial Reactor for Minimal Fab

By Ning Li, Hitoshi Habuka, Yuuki Ishida, Shin-ichi Ikeda and Shiro Hara

Submitted: September 21st 2016Reviewed: June 2nd 2017Published: December 20th 2017

DOI: 10.5772/intechopen.69986

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Ning Li, Hitoshi Habuka, Yuuki Ishida, Shin-ichi Ikeda and Shiro Hara (December 20th 2017). Silicon Epitaxial Reactor for Minimal Fab, Epitaxy, Miao Zhong, IntechOpen, DOI: 10.5772/intechopen.69986. Available from:

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