Open access peer-reviewed chapter

Silicon Epitaxial Reactor for Minimal Fab

By Ning Li, Hitoshi Habuka, Yuuki Ishida, Shin-ichi Ikeda and Shiro Hara

Submitted: September 21st 2016Reviewed: June 2nd 2017Published: March 7th 2018

DOI: 10.5772/intechopen.69986

Downloaded: 70

© 2018 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Ning Li, Hitoshi Habuka, Yuuki Ishida, Shin-ichi Ikeda and Shiro Hara (March 7th 2018). Silicon Epitaxial Reactor for Minimal Fab, Epitaxy Miao Zhong, IntechOpen, DOI: 10.5772/intechopen.69986. Available from:

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