Open access peer-reviewed chapter

Epitaxial Growth of Ge on Si by Magnetron Sputtering

By Ziheng Liu, Xiaojing Hao, Anita Ho-Baillie and Martin A. Green

Submitted: July 27th 2017Reviewed: January 5th 2018Published: March 7th 2018

DOI: 10.5772/intechopen.73554

Downloaded: 81

© 2018 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Ziheng Liu, Xiaojing Hao, Anita Ho-Baillie and Martin A. Green (March 7th 2018). Epitaxial Growth of Ge on Si by Magnetron Sputtering, Epitaxy Miao Zhong, IntechOpen, DOI: 10.5772/intechopen.73554. Available from:

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