Open access peer-reviewed chapter

Mie-Scattering Ellipsometry

By Yasuaki Hayashi and Akio Sanpei

Submitted: October 26th 2016Reviewed: July 3rd 2017Published: November 29th 2017

DOI: 10.5772/intechopen.70278

Downloaded: 161

© 2017 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Yasuaki Hayashi and Akio Sanpei (November 29th 2017). Mie-Scattering Ellipsometry, Ellipsometry Faustino Wahaia, IntechOpen, DOI: 10.5772/intechopen.70278. Available from:

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