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Technology » "Electrostatics", book edited by Huseyin Canbolat, ISBN 978-953-51-0239-7, Published: March 14, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 6

New Approach to Pull-In Limit and Position Control of Electrostatic Cantilever Within the Pull-in Limit

By Ali Yildiz, Cevher Ak and Hüseyin Canbolat
DOI: 10.5772/39116