Open access peer-reviewed chapter

Low Dielectric Materials for Microelectronics

By He Seung Lee, Albert. S. Lee, Kyung-Youl Baek and Seung Sang Hwang

Submitted: November 17th 2011Reviewed: July 11th 2012Published: October 3rd 2012

DOI: 10.5772/51499

Downloaded: 17062

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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He Seung Lee, Albert. S. Lee, Kyung-Youl Baek and Seung Sang Hwang (October 3rd 2012). Low Dielectric Materials for Microelectronics, Dielectric Material Marius Alexandru Silaghi, IntechOpen, DOI: 10.5772/51499. Available from:

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