Open access peer-reviewed chapter

Probe Technologies for Micro/Nano Measurements

By Kuang-Chao Fan, Fang Cheng, Yejin Chen and Bor-Shen Chen

Published: March 1st 2010

DOI: 10.5772/8852

Downloaded: 4233

© 2010 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Kuang-Chao Fan, Fang Cheng, Yejin Chen and Bor-Shen Chen (March 1st 2010). Probe Technologies for Micro/Nano Measurements, Cutting Edge Nanotechnology, Dragica Vasileska, IntechOpen, DOI: 10.5772/8852. Available from:

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