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Improving Performance and Reliability of MOS Devices Using Deuterium Implantation

Written By

Jae-Sung Lee

Published: 01 March 2010

DOI: 10.5772/8856

From the Edited Volume

Cutting Edge Nanotechnology

Edited by Dragica Vasileska

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Written By

Jae-Sung Lee

Published: 01 March 2010