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Chemistry » Inorganic Chemistry » "Crystallization - Science and Technology", book edited by Marcello Rubens Barsi Andreeta, ISBN 978-953-51-0757-6, Published: September 19, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 15

Thin Film Growth Through Sputtering Technique and Its Applications

By Edgar Alfonso, Jairo Olaya and Gloria Cubillos
DOI: 10.5772/35844