Open access peer-reviewed chapter

ArF Excimer Laser Annealing of Polycrystalline Silicon Thin Film

By Noriah Bidin and Siti Noraiza Ab Razak

Submitted: June 3rd 2011Reviewed: August 17th 2012Published: September 19th 2012

DOI: 10.5772/52458

Downloaded: 5325

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Noriah Bidin and Siti Noraiza Ab Razak (September 19th 2012). ArF Excimer Laser Annealing of Polycrystalline Silicon Thin Film, Crystallization Marcello Andreeta, IntechOpen, DOI: 10.5772/52458. Available from:

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