Open access

ArF Excimer Laser Annealing of Polycrystalline Silicon Thin Film

Written By

Noriah Bidin and Siti Noraiza Ab Razak

Submitted: 03 June 2011 Published: 19 September 2012

DOI: 10.5772/52458

From the Edited Volume

Crystallization - Science and Technology

Edited by Marcello Rubens Barsi Andreeta

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Written By

Noriah Bidin and Siti Noraiza Ab Razak

Submitted: 03 June 2011 Published: 19 September 2012