Open access peer-reviewed chapter

Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers

By Li and Xianming Liu

Submitted: November 26th 2010Reviewed: May 4th 2011Published: July 27th 2011

DOI: 10.5772/23438

Downloaded: 2407

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Li and Xianming Liu (July 27th 2011). Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers, Crystalline Silicon Sukumar Basu, IntechOpen, DOI: 10.5772/23438. Available from:

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