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Detection and Characterization of Nano-Defects Located on Micro-Structured Substrates by Means of Light Scattering

Written By

Pablo Albella, Francisco González, Fernando Moreno, José María Saiz and Gorden Videen

Submitted: 17 May 2010 Published: 16 March 2011

DOI: 10.5772/14049

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Wave Propagation

Edited by Andrey Petrin

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Written By

Pablo Albella, Francisco González, Fernando Moreno, José María Saiz and Gorden Videen

Submitted: 17 May 2010 Published: 16 March 2011