Nanotechnology and Nanomaterials

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui, ISBN 978-953-307-602-7, 626 pages, Publisher: InTech, Chapters published December 02, 2011 under CC BY 3.0 license
DOI: 10.5772/859
Edited Volume

Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.

CITED BY:
13 ARTICLES
  1. New Generation Electron Beam Resists: A Review
    Anushka S. Gangnaik, Yordan M. Georgiev and Justin D. Holmes
    Crossref
  2. Nano- and Microfabrication for Industrial and Biomedical Applications
    Regina Luttge
    Crossref
  3. Nanoimprinting of topographical and 3D cell culture scaffolds
    Maha Elsayed and Olivia M Merkel
    Crossref
  4. Periodic nanostructures on unpolished substrates and their integration in solar cells
    I Cornago, S Dominguez, M Ezquer, M J Rodríguez, A R Lagunas, J Pérez-Conde, R Rodriguez and J Bravo
    Crossref
  5. Consecutive imprinting performance of large area UV nanoimprint lithography using Bi-layer soft stamps in ambient atmosphere
    Shuhao Si and Martin Hoffmann
    Crossref
  6. Laser plasma cryogenic target on translating substrate for generation of continuously repetitive EUV and soft X-ray pulses
    Sho Amano
    Crossref
  7. Unraveling atomic-level self-organization at the plasma-material interface
    J P Allain and A Shetty
    Crossref
  8. Artificial Neural Network for Diffraction Based Overlay Measurement
    Hung-Fei Kuo and Anifatul Faricha
    Crossref
  9. Nanowires
    Anqi Zhang, Gengfeng Zheng and Charles M. Lieber
    Crossref
  10. Tunable Magneto-Optical Kerr Effects of Nanoporous Thin Films
    Weiwei Zhang, Jianjun Li, Xiaokun Ding, Philippe Pernod, Nicolas Tiercelin and Yujun Song
    Crossref
  11. Inkjet-Configurable Gate Array
    Mohammad Mashayekhi
    Crossref
  12. Fabrication of CdSe/ZnS quantum dots thin film by electrohydrodynamics atomization technique for solution based flexible hybrid OLED application
    Muhammad Zubair, Maria Mustafa, Kangtaek Lee, Cheolsang Yoon, Yang Hoi Doh and Kyung Hyun Choi
    Crossref
  13. Synthesis of ZnSnO3 nanocubes and thin film fabrication of (ZnSnO3/PMMA) composite through electrospray deposition
    Kyung Hyun Choi, Ghayas Uddin Siddiqui, Bong-su Yang and Maria Mustafa
    Crossref