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Fabrication of Binary Diffractive Lens on Optical Films by Electron Beam Lithography

Written By

Atsushi Motogaito and Kazumasa Hiramatsu

Submitted: 11 November 2010 Published: 09 November 2011

DOI: 10.5772/21048

From the Edited Volume

Advances in Unconventional Lithography

Edited by Gorgi Kostovski

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Written By

Atsushi Motogaito and Kazumasa Hiramatsu

Submitted: 11 November 2010 Published: 09 November 2011