Open access peer-reviewed Edited Volume

Chemical Vapor Deposition for Nanotechnology

Edited by Pietro Mandracci

Polytechnic University of Turin, Italy

Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the growth process at the nanoscale. This book aims to contribute to the knowledge of recent developments in CVD technology and its applications. To this aim, important process innovations, such as spatial ALD, direct liquid injection CVD, and electron cyclotron resonance CVD, are presented. Moreover, some of the most recent applications of CVD techniques for the growth of nanomaterials, including graphene, nanofibers, and diamond-like carbon, are described in the book.

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Chemical Vapor Deposition for NanotechnologyEdited by Pietro Mandracci

Published: January 10th 2019

DOI: 10.5772/intechopen.73342

ISBN: 978-1-78984-961-5

Print ISBN: 978-1-78984-960-8

Copyright year: 2019

Books open for chapter submissions

1374 Total Chapter Downloads

1 Dimensions Citations

chaptersDownloads

Open access peer-reviewed

1. Spatial Atomic Layer Deposition

By David Muñoz-Rojas, Viet Huong Nguyen, César Masse de la Huerta, Carmen Jiménez and Daniel Bellet

207

Open access peer-reviewed

2. Direct Liquid Injection Chemical Vapor Deposition

By Vincent Astié, Cyril Millon, Jean-Manuel Decams and Ausrine Bartasyte

222

Open access peer-reviewed

3. DLC Layers Created Using CVD Techniques and Their Application

By Marta Januś

140

Open access peer-reviewed

4. Controlled Post-treatment of Thick CVD-Diamond Coatings by High-Density Plasma Oxidation

By Tatsuhiko Aizawa

127

Open access peer-reviewed

5. Large-Area Synthesis and Growth Mechanism of Graphene by Chemical Vapor Deposition

By Chen Wang, Kizhanipuram Vinodgopal and Gui-Ping Dai

292

Open access peer-reviewed

6. Atmospheric Pressure Chemical Vapor Deposition of Graphene

By Phuong V. Pham

205

Open access peer-reviewed

7. Chemical Vapor Deposition of Helical Carbon Nanofibers

By Yoshiyuki Suda

181

Edited Volume and chapters are indexed in

  • Worldcat
  • OpenAIRE
  • Google Scholar
  • AZ ebsco
  • Base
  • CNKI
  • IET Inspec

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