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Chemistry » "Chemical Kinetics", book edited by Vivek Patel, ISBN 978-953-51-0132-1, Published: February 29, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 11

Plasma-Chemical Kinetics of Film Deposition in Argon-Methane and Argon-Acetylene Mixtures Under Atmospheric Pressure Conditions

By Ramasamy Pothiraja, Nikita Bibinov and Peter Awakowicz
DOI: 10.5772/36779