Open access

The Use of Electron Probe MicroAnalysis to Determine the Thickness of Thin Films in Materials Science

Written By

Frédéric Christien, Edouard Ferchaud, Pawel Nowakowski and Marion Allart

Submitted: 03 March 2011 Published: 01 February 2012

DOI: 10.5772/28877

From the Edited Volume

X-Ray Spectroscopy

Edited by Shatendra K. Sharma

Chapter metrics overview

4,553 Chapter Downloads

View Full Metrics

Written By

Frédéric Christien, Edouard Ferchaud, Pawel Nowakowski and Marion Allart

Submitted: 03 March 2011 Published: 01 February 2012