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Evaluation of Nanometer Cutting Tool Edge for Nanofabrication

Written By

Yuki Shimizu, Takemi Asai and Wei Gao

Submitted: 01 March 2011 Published: 22 December 2011

DOI: 10.5772/28581

From the Edited Volume

Nanofabrication

Edited by Yoshitake Masuda

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Written By

Yuki Shimizu, Takemi Asai and Wei Gao

Submitted: 01 March 2011 Published: 22 December 2011