Open access

Modeling and Simulation of MEMS Components: Challenges and Possible Solutions

Written By

Idris Ahmed Ali

Submitted: 07 April 2011 Published: 03 February 2012

DOI: 10.5772/32122

From the Edited Volume

Micromachining Techniques for Fabrication of Micro and Nano Structures

Edited by Mojtaba Kahrizi

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Written By

Idris Ahmed Ali

Submitted: 07 April 2011 Published: 03 February 2012