Open access

Particle Reduction at Metal Deposition Process in Wafer Fabrication

Written By

Faieza Abdul Aziz, Izham Hazizi Ahmad, Norzima Zulkifli and Rosnah Mohd. Yusuff

Submitted: 15 June 2011 Published: 16 May 2012

DOI: 10.5772/38239

From the Edited Volume

Manufacturing System

Edited by Faieza Abdul Aziz

Chapter metrics overview

11,224 Chapter Downloads

View Full Metrics

Written By

Faieza Abdul Aziz, Izham Hazizi Ahmad, Norzima Zulkifli and Rosnah Mohd. Yusuff

Submitted: 15 June 2011 Published: 16 May 2012