Open access

Ion Implantation in Phase Change Ge2Sb2Te5 Thin Films for Non Volatile Memory Applications

Written By

Stefania Maria Serena Privitera

Submitted: 10 May 2011 Published: 30 May 2012

DOI: 10.5772/35338

From the Edited Volume

Ion Implantation

Edited by Mark Goorsky

Chapter metrics overview

2,929 Chapter Downloads

View Full Metrics

Written By

Stefania Maria Serena Privitera

Submitted: 10 May 2011 Published: 30 May 2012