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Plasma-Chemical Kinetics of Film Deposition in Argon-Methane and Argon-Acetylene Mixtures Under Atmospheric Pressure Conditions

Written By

Ramasamy Pothiraja, Nikita Bibinov and Peter Awakowicz

Submitted: 26 May 2011 Published: 29 February 2012

DOI: 10.5772/36779

From the Edited Volume

Chemical Kinetics

Edited by Vivek Patel

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Written By

Ramasamy Pothiraja, Nikita Bibinov and Peter Awakowicz

Submitted: 26 May 2011 Published: 29 February 2012