Open access peer-reviewed chapter

AFM Application in III-Nitride Materials and Devices

By Z. Chen, L.W. Su, J.Y. Shi, X.L. Wang, C.L. Tang and P. Gao

Submitted: June 3rd 2011Reviewed: February 7th 2012Published: March 23rd 2012

DOI: 10.5772/37527

Downloaded: 3286

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Z. Chen, L.W. Su, J.Y. Shi, X.L. Wang, C.L. Tang and P. Gao (March 23rd 2012). AFM Application in III-Nitride Materials and Devices, Atomic Force Microscopy - Imaging, Measuring and Manipulating Surfaces at the Atomic Scale, Victor Bellitto, IntechOpen, DOI: 10.5772/37527. Available from:

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