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Artificial Neural Networks in Production Scheduling and Yield Prediction of Semiconductor Wafer Fabrication System

By Jie Zhang, Junliang Wang and Wei Qin

Submitted: November 2nd 2015Reviewed: April 4th 2016Published: October 19th 2016

DOI: 10.5772/63444

Downloaded: 681

© 2016 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Jie Zhang, Junliang Wang and Wei Qin (October 19th 2016). Artificial Neural Networks in Production Scheduling and Yield Prediction of Semiconductor Wafer Fabrication System, Artificial Neural Networks Joao Luis Garcia Rosa, IntechOpen, DOI: 10.5772/63444. Available from:

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