InTechOpen uses cookies to offer you the best online experience. By continuing to use our site, you agree to our Privacy Policy.

Computer and Information Science » Numerical Analysis and Scientific Computing » "Applications of Monte Carlo Method in Science and Engineering", book edited by Shaul Mordechai, ISBN 978-953-307-691-1, Published: February 28, 2011 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 4

Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function

By Kunihiro Suzuki
DOI: 10.5772/14539