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Materials Science » Biomaterials » "Application of Thermodynamics to Biological and Materials Science", book edited by Mizutani Tadashi, ISBN 978-953-307-980-6, Published: January 14, 2011 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 20

Volatile Precursors for Films Deposition: Vapor Pressure, Structure and Thermodynamics

By Igor K. Igumenov, Tamara V. Basova and Vladimir R. Belosludov
DOI: 10.5772/13356