Mode-localized mass sensors summary.
\\n\\n
Released this past November, the list is based on data collected from the Web of Science and highlights some of the world’s most influential scientific minds by naming the researchers whose publications over the previous decade have included a high number of Highly Cited Papers placing them among the top 1% most-cited.
\\n\\nWe wish to congratulate all of the researchers named and especially our authors on this amazing accomplishment! We are happy and proud to share in their success!
Note: Edited in March 2021
\\n"}]',published:!0,mainMedia:null},components:[{type:"htmlEditorComponent",content:'IntechOpen is proud to announce that 191 of our authors have made the Clarivate™ Highly Cited Researchers List for 2020, ranking them among the top 1% most-cited.
\n\nThroughout the years, the list has named a total of 261 IntechOpen authors as Highly Cited. Of those researchers, 69 have been featured on the list multiple times.
\n\n\n\nReleased this past November, the list is based on data collected from the Web of Science and highlights some of the world’s most influential scientific minds by naming the researchers whose publications over the previous decade have included a high number of Highly Cited Papers placing them among the top 1% most-cited.
\n\nWe wish to congratulate all of the researchers named and especially our authors on this amazing accomplishment! We are happy and proud to share in their success!
Note: Edited in March 2021
\n'}],latestNews:[{slug:"intechopen-partners-with-ehs-for-digital-advertising-representation-20210416",title:"IntechOpen Partners with EHS for Digital Advertising Representation"},{slug:"intechopen-signs-new-contract-with-cepiec-china-for-distribution-of-open-access-books-20210319",title:"IntechOpen Signs New Contract with CEPIEC, China for Distribution of Open Access Books"},{slug:"150-million-downloads-and-counting-20210316",title:"150 Million Downloads and Counting"},{slug:"intechopen-secures-indefinite-content-preservation-with-clockss-20210309",title:"IntechOpen Secures Indefinite Content Preservation with CLOCKSS"},{slug:"intechopen-expands-to-all-global-amazon-channels-with-full-catalog-of-books-20210308",title:"IntechOpen Expands to All Global Amazon Channels with Full Catalog of Books"},{slug:"stanford-university-identifies-top-2-scientists-over-1-000-are-intechopen-authors-and-editors-20210122",title:"Stanford University Identifies Top 2% Scientists, Over 1,000 are IntechOpen Authors and Editors"},{slug:"intechopen-authors-included-in-the-highly-cited-researchers-list-for-2020-20210121",title:"IntechOpen Authors Included in the Highly Cited Researchers List for 2020"},{slug:"intechopen-maintains-position-as-the-world-s-largest-oa-book-publisher-20201218",title:"IntechOpen Maintains Position as the World’s Largest OA Book Publisher"}]},book:{item:{type:"book",id:"499",leadTitle:null,fullTitle:"Non-Viral Gene Therapy",title:"Non-Viral Gene Therapy",subtitle:null,reviewType:"peer-reviewed",abstract:"This book focuses on recent advancement of gene delivery systems research. With the multidisciplinary contribution in gene delivery, the book covers several aspects in the gene therapy development: various gene delivery systems, methods to enhance delivery, materials with modification and multifunction for the tumor or tissue targeting. This book will help molecular biologists gain a basic knowledge of gene delivery vehicles, while drug delivery scientist will better understand DNA, molecular biology, and DNA manipulation.",isbn:null,printIsbn:"978-953-307-538-9",pdfIsbn:"978-953-51-4408-3",doi:"10.5772/1010",price:159,priceEur:175,priceUsd:205,slug:"non-viral-gene-therapy",numberOfPages:708,isOpenForSubmission:!1,isInWos:1,hash:"be9c7b064649664a22aa23fd8e975670",bookSignature:"Xu-bo Yuan",publishedDate:"November 7th 2011",coverURL:"https://cdn.intechopen.com/books/images_new/499.jpg",numberOfDownloads:63590,numberOfWosCitations:66,numberOfCrossrefCitations:19,numberOfDimensionsCitations:60,hasAltmetrics:0,numberOfTotalCitations:145,isAvailableForWebshopOrdering:!0,dateEndFirstStepPublish:"October 20th 2010",dateEndSecondStepPublish:"November 17th 2010",dateEndThirdStepPublish:"March 24th 2011",dateEndFourthStepPublish:"April 23rd 2011",dateEndFifthStepPublish:"June 22nd 2011",currentStepOfPublishingProcess:5,indexedIn:"1,2,3,4,5,6,8,9",editedByType:"Edited by",kuFlag:!1,editors:[{id:"59465",title:"Prof.",name:"Xubo",middleName:null,surname:"Yuan",slug:"xubo-yuan",fullName:"Xubo Yuan",profilePictureURL:"https://mts.intechopen.com/storage/users/59465/images/3597_n.jpg",biography:"Xu-bo Yuan, Ph.D., is a nanoparticles (drug and gene delivery) researcher in Tianjin University, China. Dr. Yuan graduated from the Beijing Institute of Science & Technology in 1989 with a degree in Chemical Engineering. He received his M.S. and Ph.D. from Tianjin University in 1995 and 2001, respectively. After doing his poster doctoral work at Institute of Polymer Chemistry, Nankai University, he was an associate professor at Tianjin University, and a visiting scientist in the Department of Chemistry and Biomolecular Engineering at the University of California, Los Angeles. 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Nagy"}],equalEditorOne:null,equalEditorTwo:null,equalEditorThree:null,productType:{id:"1",chapterContentType:"chapter",authoredCaption:"Edited by"},chapters:[{id:"42137",title:"Prolactin and Angiogenesis: Biological Implications of Microheterogeneity",slug:"prolactin-and-angiogenesis-biological-implications-of-microheterogeneity",signatures:"Kambadur Muralidhar and Jaeok Lee",authors:[{id:"147142",title:"Prof.",name:"Kambadur",middleName:null,surname:"Muralidhar",fullName:"Kambadur Muralidhar",slug:"kambadur-muralidhar"},{id:"148521",title:"Dr.",name:"Jaeok",middleName:null,surname:"Lee",fullName:"Jaeok Lee",slug:"jaeok-lee"}]},{id:"42142",title:"In vitro Effects of the Prolactin, Growth Hormone and Somatolactin on Cell Turnover in Fish Esophagus: Possible Mode of Opposite Osmoregulatory Actions of Prolactin and Growth Hormone",slug:"in-vitro-effects-of-the-prolactin-growth-hormone-and-somatolactin-on-cell-turnover-in-fish-esophagus",signatures:"Hideya Takahashi, Hiroki Kudose, Chiyo Takagi, Shunsuke Moriyama and Tatsuya Sakamoto",authors:[{id:"71340",title:"Prof.",name:"Shunsuke",middleName:null,surname:"Moriyama",fullName:"Shunsuke Moriyama",slug:"shunsuke-moriyama"},{id:"145242",title:"Prof.",name:"Tatsuya",middleName:null,surname:"Sakamoto",fullName:"Tatsuya Sakamoto",slug:"tatsuya-sakamoto"},{id:"148579",title:"Dr.",name:"Hideya",middleName:null,surname:"Takahashi",fullName:"Hideya Takahashi",slug:"hideya-takahashi"},{id:"148580",title:"Mr.",name:"Hiroki",middleName:null,surname:"Kudose",fullName:"Hiroki Kudose",slug:"hiroki-kudose"},{id:"148582",title:"Ms.",name:"Chiyo",middleName:null,surname:"Takagi",fullName:"Chiyo Takagi",slug:"chiyo-takagi"}]},{id:"42144",title:"Use of the Bovine Prolactin Gene (bPRL) for Estimating Genetic Variation and Milk Production in Aboriginal Russian Breeds of Bos taurus L.",slug:"use-of-the-bovine-prolactin-gene-bprl-for-estimating-genetic-variation-and-milk-production-in-aborig",signatures:"I.V. Lazebnaya, O.E. Lazebny, S.R. Khatami and G.E. Sulimova",authors:[{id:"148345",title:"Dr.",name:"Irina",middleName:"Viktorovna",surname:"Lazebnaya",fullName:"Irina Lazebnaya",slug:"irina-lazebnaya"},{id:"148346",title:"Prof.",name:"Galina",middleName:null,surname:"Sulimova",fullName:"Galina Sulimova",slug:"galina-sulimova"},{id:"148347",title:"Dr.",name:"Oleg",middleName:null,surname:"Lazebny",fullName:"Oleg Lazebny",slug:"oleg-lazebny"},{id:"149218",title:"Dr.",name:"Saeid",middleName:null,surname:"Khatami",fullName:"Saeid Khatami",slug:"saeid-khatami"}]},{id:"42139",title:"Prolactin in the Immune System",slug:"prolactin-in-the-immune-system",signatures:"Lorenza Díaz, Mauricio Díaz Muñoz, Leticia González, Saúl Lira-Albarrán, Fernando Larrea and Isabel Méndez",authors:[{id:"91056",title:"Dr.",name:"Fernando",middleName:null,surname:"Larrea",fullName:"Fernando Larrea",slug:"fernando-larrea"},{id:"142355",title:"Dr.",name:"Mauricio",middleName:null,surname:"Díaz Muñoz",fullName:"Mauricio Díaz Muñoz",slug:"mauricio-diaz-munoz"},{id:"145905",title:"Dr.",name:"Isabel",middleName:null,surname:"Méndez",fullName:"Isabel Méndez",slug:"isabel-mendez"},{id:"149024",title:"Dr.",name:"Lorenza",middleName:null,surname:"Díaz",fullName:"Lorenza Díaz",slug:"lorenza-diaz"},{id:"154323",title:"MSc.",name:"Leticia",middleName:null,surname:"González",fullName:"Leticia González",slug:"leticia-gonzalez"},{id:"154951",title:"MSc.",name:"Saúl",middleName:null,surname:"Lira-Albarrán",fullName:"Saúl Lira-Albarrán",slug:"saul-lira-albarran"}]},{id:"42141",title:"Neuregulin-1 (Nrg1): An Emerging Regulator of Prolactin (PRL) Secretion",slug:"neuregulin-1-nrg1-an-emerging-regulator-of-prolactin-prl-secretion",signatures:"Weijiang Zhao",authors:[{id:"144886",title:"Dr.",name:"Weijiang",middleName:null,surname:"Zhao",fullName:"Weijiang Zhao",slug:"weijiang-zhao"}]},{id:"42140",title:"Autocrine and Paracrine Regulation of Prolactin Secretion by Prolactin Variants and by Hypothalamic Hormones",slug:"autocrine-and-paracrine-regulation-of-prolactin-secretion-by-prolactin-variants-and-by-hypothalamic-",signatures:"Flavio Mena, Nilda Navarro and Alejandra Castilla",authors:[{id:"146931",title:"Dr",name:null,middleName:null,surname:"Mena",fullName:"Mena",slug:"mena"},{id:"154147",title:"MSc.",name:"Nilda",middleName:null,surname:"Navarro",fullName:"Nilda Navarro",slug:"nilda-navarro"},{id:"154148",title:"Dr.",name:"Alejandra",middleName:null,surname:"Castilla",fullName:"Alejandra Castilla",slug:"alejandra-castilla"}]},{id:"42135",title:"The Effect of Physiological and Environmental Factors on the Prolactin Profile in Seasonally Breeding Animals",slug:"the-effect-of-physiological-and-environmental-factors-on-the-prolactin-profile-in-seasonally-breedin",signatures:"Edyta Molik, Tomasz Misztal and Dorota A. Zieba",authors:[{id:"145239",title:"Dr.",name:"Edyta",middleName:null,surname:"Molik",fullName:"Edyta Molik",slug:"edyta-molik"}]},{id:"42138",title:"The Role of Prolactin in the Regulation of Male Copulatory Behavior",slug:"the-role-of-prolactin-in-the-regulation-of-male-copulatory-behavior",signatures:"Toru R. Saito, Márk Oláh, Misao Terada and György M. Nagy",authors:[{id:"145362",title:"Prof.",name:"György M.",middleName:null,surname:"Nagy",fullName:"György M. Nagy",slug:"gyorgy-m.-nagy"},{id:"148117",title:"Prof.",name:"Toru R.",middleName:"R.",surname:"Saito",fullName:"Toru R. Saito",slug:"toru-r.-saito"}]},{id:"42133",title:"Prolactin and Infertility",slug:"prolactin-and-infertility",signatures:"Gokalp Oner",authors:[{id:"64619",title:"Dr.",name:"Gokalp",middleName:null,surname:"Oner",fullName:"Gokalp Oner",slug:"gokalp-oner"}]},{id:"42134",title:"The Regulation of Pituitary Prolactin Secretion: Hypothalamic, Intrapituitary and Intracellular Factors and Signaling Mechanisms",slug:"the-regulation-of-pituitary-prolactin-secretion-hypothalamic-intrapituitary-and-intracellular-factor",signatures:"Viktória Reinhoffer, Márk Oláh, Miklós Vecsernyés, Béla E. Tóth and György M. Nagy",authors:[{id:"148147",title:"Prof.",name:"Gyorgy",middleName:"Miklós",surname:"Nagy",fullName:"Gyorgy Nagy",slug:"gyorgy-nagy"}]},{id:"42136",title:"Prolactin Receptor Isoforms in Human Breast Cancer",slug:"prolactin-receptor-isoforms-in-human-breast-cancer",signatures:"Erika Ginsburg, Christopher D. Heger, Paul Goldsmith and Barbara K. Vonderhaar",authors:[{id:"146742",title:"MA",name:"Erika",middleName:null,surname:"Ginsburg",fullName:"Erika Ginsburg",slug:"erika-ginsburg"},{id:"146747",title:"Dr.",name:"Christopher",middleName:null,surname:"Heger",fullName:"Christopher Heger",slug:"christopher-heger"},{id:"146748",title:"Dr.",name:"Paul",middleName:null,surname:"Goldsmith",fullName:"Paul Goldsmith",slug:"paul-goldsmith"},{id:"146749",title:"Dr.",name:"Barbara",middleName:null,surname:"Vonderhaar",fullName:"Barbara Vonderhaar",slug:"barbara-vonderhaar"}]},{id:"42143",title:"Physiological and Pathological Hyperprolactinemia: Can We Minimize Errors in the Clinical Practice?",slug:"physiological-and-pathological-hyperprolactinemia-can-we-minimize-errors-in-the-clinical-practice-",signatures:"Miguel Ángel Castaño López, José Luís Robles Rodríguez and Marta Robles García",authors:[{id:"145143",title:"Dr.",name:"Miguel Angel",middleName:null,surname:"Castaño Lopez",fullName:"Miguel Angel Castaño Lopez",slug:"miguel-angel-castano-lopez"},{id:"148710",title:"Dr.",name:"José Luís",middleName:null,surname:"Robles Rodríguez",fullName:"José Luís Robles Rodríguez",slug:"jose-luis-robles-rodriguez"},{id:"148711",title:"Mrs.",name:"Marta",middleName:null,surname:"Robles Garcia",fullName:"Marta Robles Garcia",slug:"marta-robles-garcia"}]}]}]},onlineFirst:{chapter:{type:"chapter",id:"73399",title:"Ultra-Precise MEMS Based Bio-Sensors",doi:"10.5772/intechopen.93931",slug:"ultra-precise-mems-based-bio-sensors",body:'\nIn recent years, there has been a growing interest in the development and implementation of innovative solutions in the form of a miniaturized bio-sensors. In this regard, in the MEMS community emphasis has been given to design and fabricate highly sensitive, and precise biomass sensors. These bio-sensors are used for detection, identification and measurement of either single and/or multi-analyte/s at lower cost, size, weight, and power consumption. Moreover, resonant devices are widely popular as a sensor for various chemical/biological applications [1]. In the context of biomass sensing, typical examples of resonant sensing include mass identification or detection [2, 3, 4, 5, 6, 7]. A key attribute of these sensors is that the output signal is the variation/shift in the resonant frequency (
In the past few years, in the MEMS community, a paradigm shift is observed in the design and implementation of micromechanical resonating sensors. A new perspective is presented in using
A schematic representation of a 2-DoF coupled resonant mass-spring-damper system to be used as a high-sensitivity biomass detector/identifier sensor. In a symmetric design, it is assumed that
Other acknowledged advantages of weakly-coupled resonating sensors are linearity (attributed to high sensitivity, relative immunity against responding to common mode noise for example, ambient pressure and/or temperature [30, 31, 32] and the parallel detection capability in the context of the mass sensing applications [33, 34, 35, 36]. These characteristics make mode-localized coupled resonators effective. For the obvious advantages as given, m-DoF coupled resonant sensors are being pursued over conventional method of resonant sensing, i.e. sensing the frequency shift,
A viable method to understand the operation of the mode-localized CR is its analysis through the transfer function model. The transfer function analysis enables to understand the system-level behavior of a biosensor unit. Figure 1 shows a lumped parameter model of a 2 DoF mass-spring-damper system in the context of CR biosensor. It shows proof masses,
Following assumptions hold true for a symmetric device-
By operating the system in vacuum, the impact of the following can be reduced, i) damping force of individual proof mass and ii) damping force that occurs between two proof masses, hence \n
By applying a Laplace Transform to Eqs. (3) and (4), following expressions are obtained:
\nwhere
\nIn Eq. (6), set\n
Similar procedure can be applied to obtain an expression for \n
Here \n
A denominator of Eqs. (14) and (15) is given by
\n\nEq. (16) is the characteristic equation of 2 DoF coupled system. Roots of Eq. (16) can be given as
\nHere, \n
By substituting the values of
With
\nEq. (22) represents initial balanced condition of a two CR.
\n\nFigure 2 represents the analytical plots of the 2-DoF CR sensor system. In Figure 2(a), mode-frequencies as a function of induced mass disorder is shown. Lower resonant frequency of the out-of-phase mode indicates that a design uses an electrical coupling between the two resonators. With
Mode-frequencies and AR veering phenomenon observed in CR mode-localized mass sensors.
for
\nFigure 3 shows a plot of AR variation as a function of mass perturbation. Two different values of coupling spring,
Amplitude ratio (AR) curve veering in 2-DoF mode-localized coupled resonators mass sensors. The lower coupling factor
Different types of the outputs with coupled resonators (CR) sensors. The amplitude ratio (AR) shift shows the highest percentage changes as a function of the mass perturbation,
The output response of a 2-DoF coupled resonator mode-localized design used for biomass sensing applications. Due to the mass addition or removal process, initial eigenmodes and eigen-frequencies of the
\nFigure 6(a) shows a frequency response (bode diagram) of a 2-DoF CR system. Figure 6(b) shows a COMSOL mode shape simulation for a designed geometry of a two mechanically coupled resonators. A structural mechanics module of COMSOL Multiphysics [37] can be used to design CR sensor and simulate for the mode shape and eigen-frequencies of the design. As seen from the FEM results, for mode 1, vibrating elements (cantilevers) move in the same direction (in-phase mode) and the same amplitudes [1, 1]. For mode 2, both the cantilevers move in opposite direction (out-of-phase mode) and the same amplitudes [1,-1]. The two simulated mode frequencies are
Output frequency response (bode diagram) of the CR sensor showing the two modes of a 2-DoF sensor. A finite element model is also depicted to determine the mode shape and resonant frequencies of the design. Note the swapping of the two modes as per the coupling used in the sensor.
In this section, different types of MEMS ultra-precise sensors based on the m-DoF CR architecture are discussed. In MEMS resonant biosensors, a surface of the micromechanical resonator is coated with a sensitive thin film. A resonant frequency shift is monitored as a result of adsorption/absorption of the target analyte/s [19]. In the same framework, CR structures are used as a mass sensors owing to the enhanced mass sensitivity and parallel monitoring of multiple analyte/s.
\nFor the first time, it was proposed that a vibration mode localization can be used to demonstrate an elevated mass sensitivity [36]. A fabricated prototype is shown in Figure 7(a). In this work, two nearly identical mechanically coupled gold-foil microcantilevers were used. For the experimentation, borosilicate microspheres (mean diameter of 4.9
Ultrasensitive mass sensor using a mode localization in coupled microcantilevers (a) fabricated prototype and (b) amplitude-frequency response of a fabricated prototype before and after the mass imbalance introduced into the system [
Moreover, using an array of polysilicon microcantilevers (up to 15) it is possible to record up to 3 orders higher changes in eigenstate based output of the sensor [35]. In an array of cantilevers, each pattern of eigenmode shifts is unique. Therefore, by examining an experimentally measured pattern of eigenmode shifts it is possible to determine to which cantilever a target analyte particle has adhered. A mass sensitivity of up to two orders higher was found as opposed to the previous work [36] reported by the same group. A mass sensitivity of up to three orders higher was found as opposed to relative frequency shifts. It is therefore feasible to design coupled resonant (CR) microstructures and use eigenmode as an output metric for enhanced parametric sensitivity over resonant sensors that use frequency shift output. However, it is also evident that merely adding the number of resonators in a 1-dimensional (1-
In a study, an array of four micro beams, S1-S4 are attached to a common shuttle mass, SM for the detection and identification of multiple analytes [19, 38]. Geometrical asymmetry in the micro beams (length mismatch) assured sufficient separation of individual resonant peaks (as seen in Figure 8(a)) at the corresponding eigenmode frequencies in the output response. An output response of the fabricated prototype along with mode shapes are shown in Figure 8(a). A capillary tube containing the specific polymer solutions was interfaced to one or all of the micro beams to functionalize them for vapor detection. Specifically, toluene and methanol, and toluene/methanol mixtures were used with the polymers to prepare analyte concentration for the functionalization of the surface of the microbeam/s in an array. The functionalized prototype was excited to motion by the piezoelectric actuator operating at a pressure level of 200
Frequency response of the single input single output scheme in an array of coupled micro beams. (a) Composite response indicated by B and the individual mode-frequencies (M1-M4) of the mode-localized micro beams upon mass absorption due to the added analyte concentration. Also shown are the resonant mode shapes of the system. (b) Resonant frequency shifts of the four individual modes as a function of added mass concentration of the analyte. Slopes of the curve determine the sensitivity to the analyte, also making it possible to identify particular vapor concentration. Reprinted from [
In the recent study, ‘Fano resonances’ were observed in purely mechanical systems constituted by an array of nano and microcantilever resonators [39]. An array of micro/nano-scale cantilevers were used for mass sensing. A fabricated prototype and the output response is shown in Figure 9. Nanoscale cantilevers (thickness of 100
Fabricated prototype (a) and (b) vibration spectra of one cantilever in an array. Up to 9 cantilevers, not shown here were used in this work to propose a single and fast measurement scheme for cantilever arrays using Fano-resonance analysis [
Mode-localized sensors that utilize an array of ideally identical, weakly coupled, vibrating microstructural elements are shown to be relatively immune to the false output. Environmental factors (such as ambient pressure [30, 32], temperature [31, 40]) and/or nonspecific bindings (in case of mass sensing) influence all the vibrating elements uniformly. These factors as mentioned ideally does not affect the eigenmodes of the system, while shifts in the resonance frequencies still occur. One of the early work addressing the common-mode rejection of mode-localized sensor is given in [30]. As shown in Figure 1, in a 2-DoF WCR sensor, induced mismatch (
\nTable 1 provides a comparative performance summary (in terms of the attainable mass sensitivity and minimum detectable mass) of the ultra-precise and highly sensitive resonant mass sensors.
\nReference | \nOutput used | \nRelative sensitivity a\n | \nMinimum detectable mass, | \nDoF | \nMaterial used | \n
---|---|---|---|---|---|
[36] | \neigenstates | \n5% to 7% (higher than frequency shift output) | \n154 | \n2 | \nborosilicate microspheres | \n
[26] | \neigenstates | \n3 orders higher | \n13.5 | \n2 | \nplatinum patches | \n
[19, 38] | \nFrequency shift | \nNA | \nNA | \n4 | \npolymer solutions | \n
[41] | \nFrequency shift | \nNA | \n1.42 × 10−14\n | \n3 | \nNA | \n
[42] | \neigenstates | \n7000 | \n10 | \n3 | \npolystyrene micro-spheres | \n
[39] | \nFrequency shift | \nNA | \n5 | \n4 | \nNA | \n
[43] | \nAR | \n34,361 | \n2.1 | \n2 | \nNA | \n
[24] | \nAR | \n2.5%/ | \n6 | \n2 | \nNA | \n
[44] | \nAR (Atmospheric pressure test) | \n25.31 (two orders higher than frequency shift output) | \n180 | \n3 | \nNanoparticles used | \n
[34] | \nEigenstates/frequency shifts | \nNA | \nNA | \n4 | \nThermally killed bacteria | \n
Mode-localized mass sensors summary.
Relative sensitivity is the ratio of sensitivity of eigenstate/s or AR output to the sensitivity of frequency shift output.
In this chapter, the state-of-the-art in MEMS resonant sensor is studied. Numerical models were presented to understand the operation of the ultra-precise, high sensitivity devices used for the bio applications. Key performance parameters such as mass sensitivity was derived for the different available outputs in the CR resonant mass sensors. From the recent case studies and a comparative analysis as provided in Table I, it can be concluded that CR resonant biosensor is emerging as a new sensing standard in the MEMS community.
\nMicro-electromechnical systems
\nmulti-degree of freedom
\nCoupled resonators
\nWeakly coupled resonators
\nAnalog-to-digital converter
\nAmplitude ratio
\nProof mass
Mechanical spring constant
Damping
Forcing term
Displacement of the proof mass
Coupling spring constant (electrical)
Coupling factor
Mass perturbation
Normalized perturbation
Normalized mass perturbation
In-phase mode frequency
Out-of-phase mode frequency
Amplitude ratio of the
Amplitude of the
Resonant frequency of the
Frequency shift
Amplitude shift
Frequency shift (normalized)
Sensitivity of AR shift to the normalized mass perturbation
Sensitivity of amplitude shift to the normalized mass perturbation
Sensitivity of frequency shift to the normalized mass perturbation
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