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Nanotechnology and Nanomaterials » "Advances in Unconventional Lithography", book edited by Gorgi Kostovski, ISBN 978-953-307-607-2, Published: November 9, 2011 under CC BY 3.0 license. © The Author(s).

Chapter 7

Fabrication of Binary Diffractive Lens on Optical Films by Electron Beam Lithography

By Atsushi Motogaito and Kazumasa Hiramatsu
DOI: 10.5772/21048