Open access peer-reviewed chapter

Fabrication of Binary Diffractive Lens on Optical Films by Electron Beam Lithography

By Atsushi Motogaito and Kazumasa Hiramatsu

Submitted: November 11th 2010Reviewed: June 6th 2011Published: November 9th 2011

DOI: 10.5772/21048

Downloaded: 2082

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Atsushi Motogaito and Kazumasa Hiramatsu (November 9th 2011). Fabrication of Binary Diffractive Lens on Optical Films by Electron Beam Lithography, Advances in Unconventional Lithography, Gorgi Kostovski, IntechOpen, DOI: 10.5772/21048. Available from:

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