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Engineering » Electrical and Electronic Engineering » "Advances in Photodiodes", book edited by Gian Franco Dalla Betta, ISBN 978-953-307-163-3, Published: March 22, 2011 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 10

Silicon Photodiodes for Low Penetration Depth Beams such as DUV/VUV/EUV Light and Low-Energy Electrons

By Lis K. Nanver
DOI: 10.5772/15396