Open access peer-reviewed chapter

n-Type β-FeSi2/p-type Si Near-infrared Photodiodes Prepared by Facing-targets Direct-current Sputtering

By Mahmoud Shaban and Tsuyoshi Yoshitake

Submitted: May 28th 2010Reviewed: September 14th 2010Published: March 22nd 2011

DOI: 10.5772/14775

Downloaded: 1375

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Mahmoud Shaban and Tsuyoshi Yoshitake (March 22nd 2011). n-Type β-FeSi2/p-type Si Near-infrared Photodiodes Prepared by Facing-targets Direct-current Sputtering, Advances in Photodiodes Gian Franco Dalla Betta, IntechOpen, DOI: 10.5772/14775. Available from:

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