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Engineering » Electrical and Electronic Engineering » "Advances in Photodiodes", book edited by Gian Franco Dalla Betta, ISBN 978-953-307-163-3, Published: March 22, 2011 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 15

n-Type β-FeSi2/p-type Si Near-infrared Photodiodes Prepared by Facing-targets Direct-current Sputtering

By Mahmoud Shaban and Tsuyoshi Yoshitake
DOI: 10.5772/14775