Open access peer-reviewed chapter

Nanolithography

By Gunasekaran Venugopal and Sang-Jae Kim

Submitted: May 14th 2012Reviewed: December 16th 2012Published: May 29th 2013

DOI: 10.5772/55527

Downloaded: 6401

© 2013 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Gunasekaran Venugopal and Sang-Jae Kim (May 29th 2013). Nanolithography, Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies Kenichi Takahata, IntechOpen, DOI: 10.5772/55527. Available from:

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