Open access peer-reviewed chapter

Mechanics of Nanoelectromechanical Systems: Bridging the Gap Between Experiment and Theory

By Hamed Sadeghian, Fred van Keulen and Hans Goosen

Submitted: May 16th 2012Reviewed: December 7th 2012Published: May 29th 2013

DOI: 10.5772/55440

Downloaded: 1688

© 2013 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

Hamed Sadeghian, Fred van Keulen and Hans Goosen (May 29th 2013). Mechanics of Nanoelectromechanical Systems: Bridging the Gap Between Experiment and Theory, Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies Kenichi Takahata, IntechOpen, DOI: 10.5772/55440. Available from:

Embed this chapter on your site Copy to clipboard

<iframe src="http://www.intechopen.com/embed/advances-in-micro-nano-electromechanical-systems-and-fabrication-technologies/mechanics-of-nanoelectromechanical-systems-bridging-the-gap-between-experiment-and-theory" />

Embed this code snippet in the HTML of your website to show this chapter

chapter statistics

1688total chapter downloads

1Crossref citations

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

Edited by Kenichi Takahata

Next chapter

Nanolithography

By Gunasekaran Venugopal and Sang-Jae Kim

Related Book

First chapter

Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice

By Masashi Ikeuchi and Koji Ikuta

We are IntechOpen, the world's leading publisher of Open Access books. Built by scientists, for scientists. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

+3,550 Open Access Books

+57,400 Citations in Web of Science

+108,500 IntechOpen Authors and Academic Editors

+560,000 Unique visitors per month

More about us