Open access peer-reviewed chapter

Liquid Encapsulation Technology for Microelectromechanical Systems

By Norihisa Miki

Submitted: May 10th 2012Reviewed: December 14th 2012Published: May 29th 2013

DOI: 10.5772/55514

Downloaded: 1983

© 2013 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

Norihisa Miki (May 29th 2013). Liquid Encapsulation Technology for Microelectromechanical Systems, Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies Kenichi Takahata, IntechOpen, DOI: 10.5772/55514. Available from:

Embed this chapter on your site Copy to clipboard

<iframe src="http://www.intechopen.com/embed/advances-in-micro-nano-electromechanical-systems-and-fabrication-technologies/liquid-encapsulation-technology-for-microelectromechanical-systems" />

Embed this code snippet in the HTML of your website to show this chapter

chapter statistics

1983total chapter downloads

1Crossref citations

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

Edited by Kenichi Takahata

Next chapter

Electroporation Based Drug Delivery and Its Applications

By Tuhin Subhra Santra, Pen-Cheng Wang and Fang Gang Tseng

Related Book

First chapter

Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice

By Masashi Ikeuchi and Koji Ikuta

We are IntechOpen, the world's leading publisher of Open Access books. Built by scientists, for scientists. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

+3,550 Open Access Books

+57,400 Citations in Web of Science

+108,500 IntechOpen Authors and Academic Editors

+560,000 Unique visitors per month

More about us