Open access peer-reviewed chapter

Laser Micromachining for Gallium Nitride Based Light-Emitting Diodes

By Kwun Nam Hui and Kwan San Hui

Submitted: May 8th 2012Reviewed: December 10th 2012Published: May 29th 2013

DOI: 10.5772/55468

Downloaded: 1549

© 2013 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Kwun Nam Hui and Kwan San Hui (May 29th 2013). Laser Micromachining for Gallium Nitride Based Light-Emitting Diodes, Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies Kenichi Takahata, IntechOpen, DOI: 10.5772/55468. Available from:

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