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Nano-Metrology Based on the Laser Interferometers

Written By

Saeed Olyaee and Samaneh Hamedi

Published: 01 April 2010

DOI: 10.5772/8740

From the Edited Volume

Advances in Measurement Systems

Edited by Milind Kr Sharma

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Written By

Saeed Olyaee and Samaneh Hamedi

Published: 01 April 2010