Open access peer-reviewed chapter

Ultra-Fast Microwave Heating for Large Bandgap Semiconductor Processing

By Mulpuri V. Rao

Submitted: June 25th 2010Reviewed: October 18th 2010Published: February 14th 2011

DOI: 10.5772/16036

Downloaded: 4936

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Mulpuri V. Rao (February 14th 2011). Ultra-Fast Microwave Heating for Large Bandgap Semiconductor Processing, Advances in Induction and Microwave Heating of Mineral and Organic Materials, Stanisław Grundas, IntechOpen, DOI: 10.5772/16036. Available from:

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