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Chemistry » Inorganic Chemistry » "Advances in Crystallization Processes", book edited by Yitzhak Mastai, ISBN 978-953-51-0581-7, Published: April 27, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 13

Characterization of Sol-Gel-Derived and Crystallized HfO2, ZrO2, ZrO2-Y2O3 Thin Films on Si(001) Wafers with High Dielectric Constant

By Hirofumi Shimizu and Toshikazu Nishide
DOI: 10.5772/35727