Open access peer-reviewed chapter

Silicon Carbide in Microsystem Technology — Thin Film Versus Bulk Material

By Mariana Amorim Fraga, Matteo Bosi and Marco Negri

Submitted: November 10th 2014Reviewed: June 5th 2015Published: September 17th 2015

DOI: 10.5772/60970

Downloaded: 1370

© 2015 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Mariana Amorim Fraga, Matteo Bosi and Marco Negri (September 17th 2015). Silicon Carbide in Microsystem Technology — Thin Film Versus Bulk Material, Advanced Silicon Carbide Devices and Processing Stephen E. Saddow and Francesco La Via, IntechOpen, DOI: 10.5772/60970. Available from:

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