Open access peer-reviewed chapter

Investigation of SiC/Oxide Interface Structures by Spectroscopic Ellipsometry

By Sadafumi Yoshida, Yasuto Hijikata and Hiroyuki Yaguchi

Submitted: December 1st 2014Reviewed: June 18th 2015Published: September 17th 2015

DOI: 10.5772/61082

Downloaded: 881

© 2015 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Sadafumi Yoshida, Yasuto Hijikata and Hiroyuki Yaguchi (September 17th 2015). Investigation of SiC/Oxide Interface Structures by Spectroscopic Ellipsometry, Advanced Silicon Carbide Devices and Processing Stephen E. Saddow and Francesco La Via, IntechOpen, DOI: 10.5772/61082. Available from:

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