Open access peer-reviewed chapter

High-responsivity SiC Ultraviolet Photodetectors with SiO2 and Al2O3 Films

By Feng Zhang

Submitted: December 1st 2014Reviewed: June 10th 2015Published: September 17th 2015

DOI: 10.5772/61019

Downloaded: 833

© 2015 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Feng Zhang (September 17th 2015). High-responsivity SiC Ultraviolet Photodetectors with SiO2 and Al2O3 Films, Advanced Silicon Carbide Devices and Processing Stephen Saddow, IntechOpen, DOI: 10.5772/61019. Available from:

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