Open access peer-reviewed chapter

3C-SiC — From Electronic to MEMS Devices

By Jean-François Michaud, Marc Portail and Daniel Alquier

Submitted: November 17th 2014Reviewed: June 10th 2015Published: September 17th 2015

DOI: 10.5772/61020

Downloaded: 1002

© 2015 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

Jean-François Michaud, Marc Portail and Daniel Alquier (September 17th 2015). 3C-SiC — From Electronic to MEMS Devices, Advanced Silicon Carbide Devices and Processing Stephen E. Saddow and Francesco La Via, IntechOpen, DOI: 10.5772/61020. Available from:

Embed this chapter on your site Copy to clipboard

<iframe src="http://www.intechopen.com/embed/advanced-silicon-carbide-devices-and-processing/3c-sic-from-electronic-to-mems-devices" />

Embed this code snippet in the HTML of your website to show this chapter

chapter statistics

1002total chapter downloads

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Next chapter

Impact of Dielectric Formation and Processing Techniques on the Operation of 4H-SiC MOSFETs

By Lucy Martin, Hua-Khee Chan, Ming-Hung Weng and Alton Horsfall

Related Book

First chapter

Hardening and Softening in Magnesium Alloys

By Zuzanka Trojanova and Pavel Lukac

We are IntechOpen, the world's leading publisher of Open Access books. Built by scientists, for scientists. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

+3,550 Open Access Books

+57,400 Citations in Web of Science

+108,500 IntechOpen Authors and Academic Editors

+560,000 Unique visitors per month

More about us