Open access peer-reviewed chapter

3C-SiC — From Electronic to MEMS Devices

By Jean-François Michaud, Marc Portail and Daniel Alquier

Submitted: November 17th 2014Reviewed: June 10th 2015Published: September 17th 2015

DOI: 10.5772/61020

Downloaded: 1002

© 2015 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Jean-François Michaud, Marc Portail and Daniel Alquier (September 17th 2015). 3C-SiC — From Electronic to MEMS Devices, Advanced Silicon Carbide Devices and Processing Stephen E. Saddow and Francesco La Via, IntechOpen, DOI: 10.5772/61020. Available from:

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