Open access peer-reviewed chapter

Physics of Charging in Dielectrics and Reliability of Capacitive RF-MEMS Switches

By George Papaioannou and Robert Plana

Published: March 1st 2010

DOI: 10.5772/8747

Downloaded: 4639

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George Papaioannou and Robert Plana (March 1st 2010). Physics of Charging in Dielectrics and Reliability of Capacitive RF-MEMS Switches, Advanced Microwave and Millimeter Wave Technologies Semiconductor Devices Circuits and Systems, Moumita Mukherjee, IntechOpen, DOI: 10.5772/8747. Available from:

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